SEM instrumentation

Zeiss EVO LS-15

• SE Detector (secondary electron)
• VPSE Detector (variable pressure secondary electron)
• EPSE Detector (extended pressure secondary electron)
• Extended range Peltier Cooling Stage
• 4Q BSD Detector (four quadrant back-scatter – lens mounted)
• Zeiss Smart SEM AII (Automated Intelligent Imaging Software)
• EDS Oxford Analysis- INCA X-Act SDD Detector (silicon drift detector - UTW) – quantitative and qualitative analysis, element distribution mapping.
• Resolution: 3nm at 30kV, 10nm at 3kV, 20nm at 1kV
• Accelerating Voltage – 3kv to 30kV
• Large specimen chamber available.