Skip to main content
Zeiss EVO LS-15
- SE Detector (secondary electron)
- VPSE Detector (variable pressure secondary electron)
- EPSE Detector (extended pressure secondary electron)
- Extended range Peltier Cooling Stage
- 4Q BSD Detector (four quadrant back-scatter – lens mounted)
- Zeiss Smart SEM AII (Automated Intelligent Imaging Software)
- EDS Oxford Analysis- INCA X-Act SDD Detector (silicon drift detector - UTW) – quantitative and qualitative analysis, element distribution mapping.
- Resolution: 3nm at 30kV, 10nm at 3kV, 20nm at 1kV
- Accelerating Voltage – 3kv to 30kV
- Large specimen chamber available.